Bulk Gas Delivery Systems

SureFlow™ Bulk Specialty Gas Supply Systems and Controllers

Linde is revolutionizing flow rates for bulk ammonia as well as many other Specialty Gases. Our bulk gas systems significantly reduce the number of cylinder change-outs required by conventional systems – helping customers achieve improvements in up-time, production costs, more consistent purity, and most importantly, safety.

The proprietary Linde enclosed heating system and new silicone rubber heat blanket system allow for higher flow rates while maintaining controlled external ton container temperatures. These systems can be skid mounted to facilitate installation and movement around the facility. They deliver continuous ammonia flows of 600 slpm with peaks greater than 3000 slpm.



  • Ammonia (NH3)
  • Chlorine (Cl2)
  • Dichlorosilane (SiH2Cl2)
  • Hydrogen Chloride (HCI)
  • Halocarbon 14 (CF4)
  • Halocarbon 23 (CHF3)
  • Halocarbon 116 (C2F6)
  • Halocarbon 218 (C3F8)
  • Halocarbon 318 (C4F8)
  • Methane (CH4)
  • Nitrous Oxide (N2O)
  • Nitrogen Trifluoride (NF3)
  • Octafluorotetrahydrofuran (C4F8O)
  • Silane (SiH4)
  • Silicon Tetrachloride (SiCl4)
  • Trichlorosilane (HSiCl3)

  • Reliable, Easy-to-Use and Safe to Operate

    • Self contained purge system
    • Fail-safe normally closed valves
    • Data acquisition or remote monitoring PC interface on controller
    • Redundant supply trains
    • Auto switchover based on weight or pressure
    • Bypass valving allows cross utilization of gas and components
    • Excess flow switch
    • Train isolation allows service on one train while the other remains in service
    • Ventilated enclosures – air intake filters and diffuser for continuous, positive ventilation
    • Double block valves for safe maintenance
    • All components are 3000 psig rated
    • Optional, redundant controller provides optimum service

    Designed for High Purity

    • Components and piping are UHP electro-polished 316L Stainless Steel with an internal finish of less than 10 Ra Max
    • Low dead space components and tubing branches for efficient purging
    • Pressure transducers with low dead space
    • Minimized wetted surface area of components
    • Springless, packless diaphragm valves
    • All welds are high-purity orbital welds
    • All manual connections are VCR type
    • Leak tight and tested to 1 × 10-9 scc/sec He


    • Component burn-in prior to shipment
    • Liquid crystal display TFT touchscreen
    • Full graphical interface
    • Emergency shutoff button on front
    • All valve actuations are verified
    • Critical alarms close all valves
    • AC/DC power failure detection
    • Ethernet communication ready
    • Optional fiber optic RS-485
    • Digital I/O optically isolated to prevent solenoid EM field from disrupting microprocessor
    • Menu-driven operation


    Let our trained experts help you select a configuration based on your specific application, contact your local Linde representative for more information.